34-60810
Part of Proflow™ II-E Filter Cartridges
Chemically-resistant cartridge for ultrapure microelectronics fluids and gases
Literature
Specifications
- End Fittings
- 222/Fin®
- Insert Style
- Stainless Steel Encapsulated Polysulfone
- Nominal Length
- 10 in / 250 mm
- Treatment Application
- Standard
TOC/Resistivity Rinse-Up (Wet-Packed)
TOC rinse-up to background plus 5ppb of feed after 70gal @ 1gpm. Resistivity rinse-up to background minus 0.2megohm-cm of feed after 30gal @ 1gpm..
Benefits
- Good liquid and gas flow rates
- Wet-pack option for quick installation
- PTFE/PP construction for chemical resistance
- Wide variety of configurations and ratings
- 100% integrity tested in clean room environment
Applications
- Bulk chemical delivery
– Acids, bases, solvents, photochemicals
- Wet etch and clean
– Dilute acids
– DI water(< 80°C)
- Ultrapure electronics-grade gases
Technical Support and Product Information
Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at www.parker.com or through your nearest Parker Hannifin Corporation office.
Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries.
Note
Specifications are subject to change without notification.
Proflow is a registered trademark of Parker Hannifin Corporation.
Viton is a registered trademark of E.I. DuPont de Nemours & Co., Inc.
Cuno is a registered trademark of Cuno Inc.
Line Specifications
- Cleanliness (Particle Shedding)
- Wet-packed: 0.2µm after 6gal at 1gpm
Data as from open bag and installed, no additional installation flushing. - Effective Filtration Area per 10 inch (250 mm) Cartridge
- 9.3 ft² / 0.86 m²
- Effective Filtration Area per 5 inch (130 mm) Cartridge
- 4.6 ft² / 0.43 m²
- Filter Rating
- 0.03, 0.05, 0.10, 0.2, 0.45, 1 µm
- Gasket/O-Ring Material
- Buna N, EPDM, FEP-Encapsulated Silicone (O-Rings only), FEP-Encapsulated Viton (O-Rings only), None, Silicone, Viton®
- Maximum Forward Differential Pressure/Temperature @ 180°F (82°C)
- 2.8 bar / 40 psid
- Maximum Forward Differential Pressure/Temperature @ 75°F (24°C)
- 5.5 bar / 80 psid
- Maximum Reverse Differential Pressure/Temperature @ 75°F (24°C)
- 3.4 bar / 50 psid
- Membrane
- PTFE
- Structure
- Polypropylene
- Support Layers
- Polypropylene
- Thickness (Gaskets only)
- 0.125″ (3 mm), 0.200″ (5 mm), (1) 0.200″ (5 mm) & (1) 0.125″ (3 mm), No Gasket
- Treatment Options
- Standard, Wet Packed
- Typical Water Flow Rates
- 0.03 µm – 0.6 gpm/psid (3.31 lpm/100 mbar), 0.05 µm – 0.8 gpm/psid (4.39 lpm/100 mbar), 0.10 µm – 1 .7 gpm/psid (9.33 lpm/100 mbar), 0.20 µm – 3.2 gpm/psid (17.5 lpm/100 mbar), 0.45 µm – 7.6 gpm/psid (41.72 lpm/100 mbar), 1.00 µm – 9.1 gpm/psid (49.97 lpm/100 mbar)
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