Proflow™ II-E Filter Cartridges

The Proflow™ II-E filter cartridge uses a PTFE membrane along with high purity polypropylene supports that provide an economical alternative to all-fluoropolymer cartridges. It provides a high degree of retention and cleanliness along with good flow and lifetime. This filter is ideally suited for ultrapure microelectronics fluids and gases. The hydrophobic PTFE membrane serves as a highly efficient barrier to insure low moisture content of gases. It is available dry or wet packed for quick installation and lower extractables.

TOC/Resistivity Rinse-Up (Wet-Packed)

TOC rinse-up to background plus 5ppb of feed after 70gal @ 1gpm. Resistivity rinse-up to background minus 0.2megohm-cm of feed after 30gal @ 1gpm..

Benefits

• Good liquid and gas flow rates
• Wet-pack option for quick installation
• PTFE/PP construction for chemical resistance
• Wide variety of configurations and ratings
• 100% integrity tested in clean room environment

Applications

• Bulk chemical delivery
  – Acids, bases, solvents, photochemicals

• Wet etch and clean
  – Dilute acids
  – DI water(< 80°C)

• Ultrapure electronics-grade gases

Technical Support and Product Information

Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at www.parker.com or through your nearest Parker Hannifin Corporation office.

Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries.

Note

Specifications are subject to change without notification.
Proflow is a registered trademark of Parker Hannifin Corporation.
Viton is a registered trademark of E.I. DuPont de Nemours & Co., Inc.
Cuno is a registered trademark of Cuno Inc.