Coarse Straining

Upstream protection and bulk separation

Cartridge Filtration

Precision fine and depth filtration

Membrane Technologies

Micro, ultra, nano and reverse osmosis

Pre-Treatment

Conditioning ahead of the process

Purification

Reverse osmosis and demineralization

Polishing and Service

High purity finishing and on-site support

All-fluoropolymer cartridge for aggressive applications

Specifications

End Fittings
226/Flat
Filter Rating
0.10 µm
Nominal Length
20 in / 500 mm
O-Rings Material
None
Typical Water Flow Rates
2.3 gpm/psid / 12.7 lpm/100 mbar

Materials of Construction

100% Fluoropolymer construction

TOC/Resistivity Rinse-Up (Wet-Packed)

TOC recovery within 3-5ppb of feed without additional rinse-up. Resistivity recovery within 0.4 megohm-cm of feed after 22gal @ 1gpm.

Benefits

  • Economical
  • Wet-pack option for quick installation
  • All-fluoropolymer for maximum chemical resistance
  • 100% integrity tested for consistent quality

Applications

  • Wet etch and clean
    – Phosphoric acid
    – Sulfuric acid
    – Hydrofluoric acid
    – Nitric acid
    – Piranha
    – SC1, SC2
    – NMP-based solvents
  • Other high temperature or ozonated processes

Technical Support and Product Information

Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at www.parker.com or through your nearest Parker Hannifin Corporation office.

Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries.

Note

Specifications are subject to change without notification
Fluoroflow is a registered trademark of Parker Hannifin Corporation.
Viton and Kalrez are registered trademarks of E.I. DuPont de Nemours & Co., Inc.
Chemraz is a registered trademark of Green, Tweed Inc.

Line Specifications

Cleanliness (Particle Shedding)
Wet-packed 0.2µm after 7gal at 1gal/min
Effective Filtration Area per 10 inch (250 mm) Cartridge
6.8 ft² / 0.63 m²
Maximum Forward Differential Pressure/Temperature @ 167°F (75°C)
3.8 bar / 55 psid
Maximum Forward Differential Pressure/Temperature @ 257°F (125°C)
2.0 bar / 30 psid
Maximum Forward Differential Pressure/Temperature @ 300°F (150°C)
1.0 bar / 15 psid
Maximum Forward Differential Pressure/Temperature @ 75°F (24°C)
5.5 bar / 80 psid
Maximum Reverse Differential Pressure/Temperature @ 250°F (121°C)
1.0 bar / 15 psid
Maximum Reverse Differential Pressure/Temperature @ 75°F (24°C)
3.4 bar / 50 psid
Metals Extractables
Standard: < 20ppb (total), Ultraclean: < 5ppb (total)
Treatment Options
Ozone UPW Flush and Dry, Ultraclean (Pre-Wet), UPW Flush and Dry, Wet Packed

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