Fluoroflow® Filter Cartridges

The Fluoroflow® filter cartridge is our standard product for aggressive wet etch and clean applications. It provides good flow rates and on-stream life at an economical cost. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 150°C. It is available either ozone DI flushed and dried or wet-packed for quick installation.

Materials of Construction

100% Fluoropolymer construction

TOC/Resistivity Rinse-Up (Wet-Packed)

TOC recovery within 3-5ppb of feed without additional rinse-up. Resistivity recovery within 0.4 megohm-cm of feed after 22gal @ 1gpm.

Benefits

• Economical
• Wet-pack option for quick installation
• All-fluoropolymer for maximum chemical resistance
• 100% integrity tested for consistent quality

Applications

• Wet etch and clean
  – Phosphoric acid
  – Sulfuric acid
  – Hydrofluoric acid
  – Nitric acid
  – Piranha
  – SC1, SC2
  – NMP-based solvents

• Other high temperature or ozonated processes

Technical Support and Product Information

Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at www.parker.com or through your nearest Parker Hannifin Corporation office.

Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries.

Note

Specifications are subject to change without notification
Fluoroflow is a registered trademark of Parker Hannifin Corporation.
Viton and Kalrez are registered trademarks of E.I. DuPont de Nemours & Co., Inc.
Chemraz is a registered trademark of Green, Tweed Inc.