Coarse Straining

Upstream protection and bulk separation

Cartridge Filtration

Precision fine and depth filtration

Membrane Technologies

Micro, ultra, nano and reverse osmosis

Pre-Treatment

Conditioning ahead of the process

Purification

Reverse osmosis and demineralization

Polishing and Service

High purity finishing and on-site support

Polypropylene membrane cartridges for microelectronics

Specifications

Effective Filtration Area per 10 inch (250 mm) Cartridge
7.7 ft² / 0.72 m²
End Fittings
222/Flat
Filter Rating
0.04 µm
Insert Style
No Insert (Standard)
Maximum Reverse Differential Pressure/Temperature @ 75°F (24°C)
4.1 bar / 60 psid
Nominal Length
30 in / 750 mm
Typical Water Flow Rates
0.41 gpm/psid / 2.2 lpm/100 mbar

TOC/Resistivity Rinse-Up (Wet-Packed)

TOC rinse-up to background plus 5ppb of feed after 40gal @ 1gpm.
Resistivity rinse-up to background minus 0.2megohm-cm of feed after 40gal @1gpm.

Benefits

  • High-retention membrane
  • Wide range of configurations and ratings
  • 100% integrity tested

Applications

  • Bulk photoresist
  • Bulk electronics grade chemicals

Technical Support and Product Information

Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at www.parker.com or through your nearest Parker Hannifin Corporation office.

Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries.

Note

Specifications are subject to change without notification.
Polyflow is a registered trademark of Parker Hannifin Corporation.
Viton is a registered trademarks of E.I. DuPont de Nemours & Co., Inc.
Cuno is a registered trademarks of Cuno, Inc.

Line Specifications

Cleanliness (Particle Shedding)
Wet-packed 0.2µm after 10gal at 1gpm
Data as from open bag and installed, no additional installation flushing.
Gasket/O-Ring Material
Buna N, EPDM, FEP-Encapsulated Viton (O-Rings only), None, Silicone, Viton®
Maximum Forward Differential Pressure/Temperature @ 180°F (82°C)
2.8 bar / 40 psid
Maximum Forward Differential Pressure/Temperature @ 75°F (24°C)
5.5 bar / 80 psid
Membrane
Polypropylene
Metals Extractables
< 50ppb (total)
Structure
Polypropylene
Support Layers
Polypropylene
Thickness (Gaskets only)
0.125″ (3 mm), 0.200″ (5 mm), (1) 0.200″ (5 mm) & (1) 0.125″ (3 mm), None
Treatment Options
Standard, Wet Packed

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