Coarse Straining

Upstream protection and bulk separation

Cartridge Filtration

Precision fine and depth filtration

Membrane Technologies

Micro, ultra, nano and reverse osmosis

Pre-Treatment

Conditioning ahead of the process

Purification

Reverse osmosis and demineralization

Polishing and Service

High purity finishing and on-site support

Increased performance all-fluoropolymer cartridge for aggressive applications

Specifications

End Fittings
226/Fin
Filter Rating
0.2 µm
Nominal Length
10 in / 250 mm
Temperature Options
Electronic Standard (150°C Max), High Temperature (180°CMax)
Typical Water Flow Rates
3.9 gpm/psid / 21.5 lpm/100 mbar

Materials of Construction

100% Fluoropolymer construction
All components are thermally bonded to ensure integrity and reduce extractables.

TOC/Resistivity Rinse-Up (Wet-Packed)

TOC recovery within 3-5ppb of feed without additional rinse-up. Resistivity recovery within 0.4 megohm-cm of feed after 22gal @ 1gpm.

Benefits

  • Increased filtration area for longer life
  • Higher flow rates for increased bath turn over
  • Wet-pack option for quick installation
  • Ultraclean wet-pack option for absolute cleanliness
  • All-fluoropolymer for most maximum chemical resistance
  • 100% integrity tested for consistent quality

Applications

  • Wet etch and clean.
    – Phosphoric acid
    – Sulfuric acid
    – Hydrofluoric acid
    – Nitric acid
    – Piranha
    – SC1, SC2
    – NMP-based solvents
  • Other high temperature or ozonated processes

Technical Support and Product Information

Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at www.parker.com or through your nearest Parker Hannifin Corporation office.

Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries.

Note

Specifications are subject to change without notification
Fluoroflow is a registered trademark of Parker Hannifin Corporation.
Viton and Kalrez are registered trademarks of E.I. DuPont de Nemours & Co., Inc.
Chemraz is a registered trademark of Green, Tweed Inc.

Line Specifications

Cleanliness (Particle Shedding)
Wet-packed: 0.2µm after 7gal at 1gpm
Effective Filtration Area per 10 inch (250 mm) Cartridge
9.8 ft² / 0.91 m²
Effective Filtration Area per 4 inch (100 mm) Cartridge
4.8 ft² / 0.45 m²
Maximum Forward Differential Pressure/Temperature @ 167°F (75°C)
3.8 bar / 55 psid
Maximum Forward Differential Pressure/Temperature @ 167°F (75°C) (HT Option)
5.1 bar / 75 psid
Maximum Forward Differential Pressure/Temperature @ 257°F (125°C)
2.0 bar / 30 psid
Maximum Forward Differential Pressure/Temperature @ 257°F (125°C) (HT Option)
3.4 bar / 50 psid
Maximum Forward Differential Pressure/Temperature @ 300°F (150°C)
1.0 bar / 15 psid
Maximum Forward Differential Pressure/Temperature @ 356°F (180°C) (HT Option)
1.0 bar / 15 psid
Maximum Forward Differential Pressure/Temperature @ 75°F (24°C)
5.5 bar / 80 psid
Maximum Forward Differential Pressure/Temperature @ 75°F (24°C) (HT Option)
6.8 bar / 100 psid
Maximum Reverse Differential Pressure/Temperature @ 250°F (121°C)
1.0 bar / 15 psid
Maximum Reverse Differential Pressure/Temperature @ 75°F (24°C)
3.4 bar / 50 psid
Metals Extractables
Standard: < 20ppb (total), Ultraclean: < 5ppb (total)
O-Rings Material
Chemraz®, FEP-Encapsulated Silicone, FEP-Encapsulated Viton, Kalrez, None, Silicone, Viton®
Treatment Options
Ozone UPW Flush and Dried, Ultraclean (Pre-Wet), UPW Flush and Dried, Wet Packed

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